EUV-based imaging steps into the limelight

Five Dutch universities and six companies joined hands to peer into the nanometer realm without the need for expensive optics.

Paul van Gerven

This article is exclusively available to premium members of Bits&Chips. Already a premium member? Please log in. Not yet a premium member? Become one for only €15 and enjoy all the benefits.

Login

Become a premium member for only €15