VDL ETG was capable of pulling off the wafer handler job for ASML, but the willingness to invest simply wasn’t there.
VDL remains ASML’s most important supplier of mechatronic modules. In recent years, however, the industrial group has suffered damage in its relationship with its largest customer. With the arrival of the NXE:3800, it became clear that independently developing the wafer handler for this EUV machine was a bridge too far for VDL ETG.
It was precisely for these modules that the key supplier had taken on full product responsibility around 2012. From that point on, they had total control in Acht. ASML continued to define the requirements, but ETG was free to work out the rest itself: Design and material choices all shifted to Acht. Building high-tech equipment was, after all, what they were good at. The deal potentially elevated VDL ETG to a status comparable to that of Zeiss, Trumpf and Heidenhain.


