ASML’s high-NA stages needed more oomph

To maintain throughput, ASML’s engineers had to seriously beef up the stages in high-NA scanners while maintaining stringent positional control.

Paul van Gerven

This article is exclusively available to premium members of Bits&Chips. Already a premium member? Please log in. Not yet a premium member? Become one for only €15 and enjoy all the benefits.

Login

Become a premium member for only €15