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Nearfield Instruments penetrates high-volume chip manufacturing at Samsung
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Nearfield Instruments’ metrology equipment has penetrated high-volume memory chip fabrication at Samsung. This marks a breakthrough for atomic force microscopy in IC manufacturing environments.
After an intensive evaluation period, Quadra, Nearfield Instruments’ metrology system, has penetrated high-volume chip manufacturing at Samsung. This was confirmed by Young Hoon Sohn, vice president of Metrology and Inspection at Samsung’s memory division at the TNO Semicon Innovation Day, held 17 April at the High Tech Campus in Eindhoven.
Sohn presented via an online video link and responded to questions from Bits&Chips that Samsung uses Nearfield’s Quadra devices in addition to ASML’s Yieldstar for optical metrology. Quadra maps the surface of chips with atomic force measurements. By deploying many atomic force probes in parallel, the Rotterdam-based company achieves high throughput.
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