Volume: 2023
Issue: 8
Date: 15 December 2023
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Volume: 2023
Issue: 8
Date: 15 December 2023
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Table of contents
“We will out-develop them all”
ASML’s chief diplomat closes in on Silver Jubilee
High-NA lithography: the shrink continues
Tracing the path of light through an EUV scanner
High-NA optics: the battle for the angles
Industrial resonance with fundamental EUV research
Atomic masonry for EUV
Manufacturing high-NA mirrors required a tour de force in metrology
ASML’s high-NA stages needed more oomph
A high-NA scanner isn’t enough
A partnership built on the dream of EUV success
20 years of supplying high-purity vacuum components to ASML
“We have some stubborn engineers, and so have they”
Renishaw supports ASML with bespoke laser encoder solution
The growing pains of a software skyrocket
Changing the wheels on a moving F1 race car
Growing together as customer and supplier through knowledge sharing
ASML’s 40-year journey: navigating challenges with Capgemini
Taking performance analysis to the system level
NTS is preparing for a local-for-local world
Challenging physics, challenging collaboration
Next steps in machine conditioning
Contributing to sustainability at ASML: from recyclable blister packaging to ergonomic lying cart
Acclimatizing at ASML
Getting up to speed in precision as a mechanical designer
“Only by sharing knowledge can we push the boundaries of what’s technically possible”
CMOS goes 3D
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