Infinitesima expands Imec collaboration into high-volume territory

UK-based metrology specialist Infinitesima has launched a three-year development project to enhance its Metron3D 300mm in-line wafer metrology system. Partnering with Imec and ASML, the project aims to tackle the escalating metrology demands of emerging semiconductor technologies such as hybrid bonding, high-NA EUV lithography and CFET-based 3D logic.

Infinitesima’s partnership with Imec began in 2021, starting with enabling tip-induced nanoscale tomographic sensing using its Rapid Probe Microscope (R˜PM) research and failure analysis applications. RPM technology blends atomic force microscopy with laser activation and interferometry to address limitations of traditional optical and electron beam inspection tools. Its Metron3D platform brings this capability into high-volume manufacturing

The new collaboration, therefore, marks the expansion into high-speed, in-line production metrology. A Metron3D system will be sited at Imec’s Leuven facility to develop new tool capabilities and enhancements.