ASML and Canadian quantum computing company Xanadu have announced a collaboration to investigate how advanced lithography can improve the manufacturing of photonic quantum processors. The partners will study how lithography process innovations can reduce optical losses in photonic chips by improving pattern fidelity and limiting line edge roughness. Lower optical losses are considered a key requirement for building fault-tolerant, error-corrected photonic quantum computers capable of solving large-scale computational problems.

Xanadu’s approach to quantum computing employs photons instead of superconducting circuits or trapped ions. Minimizing losses as light travels through integrated photonic circuits is essential for scaling the technology. The partners will evaluate advanced lithography approaches that could improve patterning accuracy and enable lower-loss photonic structures, laying the groundwork for future high-volume manufacturing.
Dutch startup Quix is also pursuing quantum processors based on integrated photonics.


