ASML will ship a high-NA EUV scanner for development purposes to Samsung in Q4 or in Q1 2025, according to the Seoul Economic Daily. This would put the Korean firm roughly alongside TSMC, which will reportedly receive a high-NA system this year as well. ASML has shipped two next-gen EUV tools so far, both of which went to Intel’s development fab in Oregon. At the presentation of its Q2 results in July, the Veldhoven-based equipment manufacturer didn’t announce any new high-NA shipments.
Despite proceeding with high-NA development using ASML’s EXE:5000 system, Samsung has cut back on plans to implement its successor(s) in manufacturing, Business Korea reported. This decision would also affect the joint R&D center with ASML announced in December. A Samsung official, however, has denied the report. "There is no change in the plan to introduce ASML high-NA EUV equipment," and assured that "the R&D center of the two companies will also be established in the optimal location."
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